Separating and purifying system for sulfur hexafluoride and carbon tetrafluoride

发明--六氟化硫和四氟化碳分离提纯系统.jpg

The invention discloses a separating and purifying system for sulfur hexafluoride and carbon tetrafluoride. The system comprises a mixed gas recovering pipeline which is respectively connected with a circulating purifying pipeline, a sulfur hexafluoride purifying pipeline and a carbon tetrafluoride purifying pipeline. The system can be used for overcoming the defect that marketed sulfur hexafluoride gas recovering and purifying devices cannot separate and purify carbon tetrafluoride gas, not only separating and purifying sulfur hexafluoride and carbon tetrafluoride respectively but also integrating recovery, respective separation and purification and re-filling of gases, and has the characteristics of complete function, simplicity in operation, economy and practicality and the like.